... Microchannels,” in The Handbook of MEMS, M. Gad- el- Hak, ed., CRC Press, Boca Raton, Florida.Shih, J.C., Ho, C M., Liu, J., and Tai, Y C. (1995) “Non-Linear Pressure Distribution in UniformMicrochannels,” ... Smoluchowski, M. (1898) “Ueber Wärmeleitung in verdünnten Gasen,” Ann. Phys. Chem. 64, pp. 101–30.Went, F.W. (1968) The Size of Man,” Am. Sci. 56, pp. 40 0 41 3. 4- 3 6 MEMS: Introduction and Fundamentals â ... speed-up can be obtained using the graph-based algorithm.5.3.3 The Structural Simulator The membrane of the micropump is modeled using the linear string-beam equation as given by the fol-lowing...