. voltage and acceleration of the different sensors with the configurations noted in the figures 62 Figure 3.22 Relation between the voltage and the acceleration: comparison between simulation and. Calibration set-up consisting of the rotating disk, the CVC, wireless circuits and the capacitive acceleration sensor under test 61 Figure 3.20 The CVC circuit and interface of the calibration set-up. mass. Upon acceleration, the m ass b e a m g o ia Figure 1.3 Capacitive measurement of acceleration. ' Silicon Modeling and simulation o f the capacitive accelerometer 8 Chapter I proof mass