[...]... Features 496 Plasma- Related Issues and Fabrication Techniques 497 References Index 529 499 XI Preface Applications of low-temperature plasmas for nanofabrication is a very new and quickly emerging area at the frontier of physics and chemistry of plasmas and gas discharges, nanoscience and nanotechnology, solidstate physics, and materials science Such plasma systems contain a wide range of neutral and charged,... cross-roads where the physics and chemistry of plasmas and gas discharges meet nanoscience and materials physics and engineering It certainly does not aim at the entire coverage of the existing reports on the variety of nanostructures, nanomaterials, and nanodevices on one hand and on the plasma tools and techniques for materials synthesis and processing at nanoscales and plasma- aided nanofabrication on the... basic concepts and applications of plasma nanoscience, a rapidly emerging multidisciplinary research area at the forefront of, the physics of plasmas and gas discharges; nanoscience and nanotechnology; astrophysics; materials science and engineering; surface science and structural chemistry [4], and to show the importance of plasma environments in nanoscale processes spanning from astrophysics to plasma- aided... performance of numerous plasma- based nanofabrication facilities and in-depth understanding of fundamental properties and operation principles of such devices and tools and elementary processes involved at every nanofabrication step Indeed, if a particular plasma tool works well and allows one to fabricate nanostructured wafers and integrated circuits with a huge number of nano-sized transistors and synthesize... and collaborations of other present and past members and associates of the Plasma Nanoscience (The University of Sydney, Australia) and Plasma Sources and Applications Center (NTU, Singapore) teams Y Akimov, K Chan, J W Chai, M Chan, H L Chua, Y C Ee, S Fisenko, N Jiang, Y A Li, V Ligatchev, W Luo, E L Tsakadze, C Mirpuri, V Ng, L Sim, Y P Ren, M Xu, and all other co-authors of my research papers and. .. highly-complex plasma nanotools is in comprehensive understanding of underlying elementary physical and chemical processes both in the ionized gas phase and on the solid surfaces exposed to the plasma This is one of the main objectives of this monograph In my decision to write this book I was motivated by the fact that even though basic properties and applications of low-temperature plasma systems and even... generating cosmic dust and discusses the issues related to nanotechnology research directions In Section 1.4 we introduce the concept of deterministic nanofabrication and briefly discuss some of the most important aims and approaches of plasma nanoscience Section 1.5 explains the structure of the monograph and gives advice to the reader 2 1 Introduction 1.1 Main Concepts and Issues By “a plasma one usually... variety of building units and then using them to synthesize nano-scale objects and, moreover, control “uncontrollable” atomic-level self-organization processes on plasma- exposed solid surfaces We will also introduce basic concepts of plasma nanoscience and overview the ongoing reserach efforts aimed at achieving the ultimate goal of plasma- based deterministic synthesis of various nanostructures and elements... and outstanding performance of the plasma- based systems in nanofabrication, as well as about possible ways of controlling the plasma- based nanoassembly Main attention is paid to the conditions relevant to the laboratory gas discharges and industrial plasma reactors A specialized and comprehensive description of the most recent experimental, theoretical and computational efforts to understand unique... in nanofabrication of a wide variety of common nanostructures, such as carbon nanotubes, quantum dots, nanowalls, nanowires, etc Therefore, there is a significant gap between the knowledge and information related to basic properties and applications of low-temperature plasmas and numerous nanoassembly processes that merely use such plasmas as a tool Thus, the question about the actual role of the plasma . important prac- tical advices to researchers how to develop plasma- based nanoassem- bly processes, select the right plasma type, design appropriate plasma tools and reactors, and provided specific. performance of numerous plasma- based nanofabrication facilities and in-depth un- derstanding of fundamental properties and operation principles of such devices and tools and elementary processes. significant gap between the knowl- edge and information related to basic properties and applications of low-temperature plasmas and numerous nanoassembly processes that merely use such plasmas as