[...]... provided for each type of actuation as they relate to particular types of MEMS Chapter 5 is a blend of all the material comprised in the book thus far, as it attempts to combine elements of transduction (actuation/sensing) with flexible connectors in examples of real-life microdevices that are studied in the static domain Concrete MEMS examples are analyzed from the standpoint of their structure and... linear of stiffness and one rotary of stiffness The crossstiffness is represented in Fig 1.5 (c), which attempts to give a physical, spring-based representation of the situation where the moment creates a linear deformation (the deflection by means of the eccentric disk which rotates around a fixed shaft and thus moves vertically the tip of the beam Figure 1.5 3 Spring-based representation of the bending... basics 11 plane Two particular cases of the general state of deformations described above are the state of plane stress and the state of plane strain In a state of plane stress, as the name suggests, the stresses are located in a plane (such as the middle plane that is parallel to the xy plane in Fig 1.7) The following stresses are zero: Figure 1.8 Plane state of stress/strain Thin plates, thin bars... plates, thin bars and thin beams that are acted upon by forces in their plane, are examples of MEMS components that are in a plane state of stress For thicker components, the cross-sections of shafts in torsion are also in a state of plane stress In a state of plane strain, the stress perpendicular to the plane of interest does not vanish, but all other stresses in Eqs (1.31) are zero Microbeams that... dimension are in a state of plane strain for instance Figure 1.8 illustrates both the state of plane stress and the state of plane strain Example 1.2 A thin microcantilever, for which t . Mechanics of Microelectro- mechanical Systems This page intentionally left blank Nicolae Lobontiu Ephrahim Garcia Mechanics of Microelectromechanical Systems KLUWER. MEMS SCALING Problems Index 343 343 363 365 381 390 395 PREFACE This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from