... showing both multilayer mirrors. The
illuminated (active) angular zone and the smallest angles of incidence (for p = q)
are indicated by dotted lines
10
11
12
13
14
15
16
0.30 0.35 0.40
10
11
12
13
14
15
16
0.28 ... outermost layer,
Δn
1
1+ n
2
1
+ k
2
1
k
1
+Δk
1
1 − n
2
1
− k
2
1
n
1
> 0, (25 .14 )
and for the inner layers
Δn
i 1
Δk
i
<...
... P
2
Sign
(concave/convex)
01/ 11 / 11 / 11 1
F
x
− (a
11
x + a
12
y +
a
13
z + a
14
)
0 −x/0 −x −a
11
x −a
11
x
F
y
− (a
22
y · sign +
a
12
xa
23
z + a
24
)
1 ρ · sign R · sign y
0
− yy
0
− y
F
z
− (a
33
z + a
13
x ... 35
0246 810 1 214
0.0
0.2
0.4
0.6
0.8
1. 0
-15 deg
15 deg
s-Reflectivity
θ − θ
B
(arcsec)
Si ( 311 )
10 keV
0 deg
Fig. 2 .14 . Rocking curves of Si(...
... locations in the beamline
Position in beamline Horizontal Vertical width
width (mm) (mm)
SRW PHASE SRW PHASE
At nominal “focus” of first mirror 10 . 911 .11 2. 011 .3
At position of collimating mirror 38 .13 7.043.936.9
2 ... [7 10 ]. The
interest in WGs results from their ability to provide coherent beams as small
as 10 nm [11 ,12 ], accepting the full coherent phase space volume of t...
... Sci. Instrum. 63 (1) , (19 92)
14 . R. Signorato, M. Sanchez del Rio, in Proceedings of SPIE, vol. 315 2, 19 97, p. 13 6
8 Volume Effects in Zone Plates 16 5
0 20406080 10 0 12 0 14 0 16 0
x-axis / nm
40
80
12 0
16 0
200
240
280
zone ... according to (8.9)
with the theory of thin gratings only 11 .6% diffraction efficiency is obtained
at 256 nm height for L:S = 10 nm:30 nm and L...
... plane–elliptical demonstration
11 The Nanometer Optical Component Measuring Machine 19 9
Fig. 11 .7. Principle of 3D-mapping (dimensions in millimeter)
Fig. 11 .8. NOM 3D-measurement on a 310 × 11 8 mm
2
Zerodur ... 0. 01 μrad rms or 0.5 nm rms in height over a scan length of 480 mm at
the center line of the sample (Fig. 11 .4).
19 8 F. Siewert et al.
1, 0E-07
1, 0E-06
1, 0E-05...
... <1MeV
ΔE/E White
beam
10
−2
White beam 10
−3
10
−3
10
−3
Δ 36 nm [12 ] 45 nm [13 ] 50 nm [14 ] 250 nm [15 ] 40 × 25 nm
2
[16 ]
30 nm [17 ] 50 nm [18 ]
E, energy range; ΔE/E, energy bandwidth; Δ, best measured ... ≈
Δn(λ)
2sin
2
ϑ
i
. (16 .1)
Owing to the very small deviation of the real part of n from unity in X-
rays (δ =10
−4
10
−5
, depending on the photon energy and th...
... in the rows with 17 and with hypothetical 33
prisms, respectively. With the rocking curve centered on the incident beam the
refracted intensity from rows 13 17 (Fig. 21. 7b) and 26–29 (Fig. 21. 7d) ... air gap. In (b )and( c) rows 13 17 from the upper lens half and in (d)
and (e) the last four rows 26–29 are shown. In (a), (b), and (d) are obtained with
the maximum of the...