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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M Gad el Hak Part 5 ppsx

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 5 ppsx

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 5 ppsx

... of the Navier–Stokes equations, as well as the molecular interaction models of the MD and the DSMC methods. Although it may seem that the molecular simulation methods are more fundamental, theyrequire ... particularly important for simulation of gas flows in MEMS components.If we consider a micromotor or a micro-comb-drive mechanism, gas flow in most of the device can besimulated using the slip-based ... reason, the model with b ϭ Ϫ1 results in 10% error in the slip velocity 6-1 4 MEMS: Introduction and Fundamentals BoltzmannDSMC datab = 0b = −10 .5 00.01 0. 05 0.1 0 .5 Kn1 5 1011 .5 U* (y,Kn)FIGURE...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 9 ppsx

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 9 ppsx

... Taylor & Francis Group, LLC1 1-2 MEMS: Introduction and Fundamentals attention of MEMS researchers since the early days of MEMS development, and there have been severaldemonstrations of micromotors ... gradients in the microchannel. Probably the most common cause of this is a mis-match in the height of the fluid level at the reservoirs. Although there may not be a mismatch of fluid levelat the start ... developed a multicomponent model for electroosmotically drivenseparation processes. They performed two-dimensional numerical simulations and demonstrated thatnonuniform electroosmosis in these...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 11 ppsx

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 11 ppsx

... BH)21ᎏ21 2-3 2 MEMS: Introduction and Fundamentals © 2006 by Taylor & Francis Group, LLC1 2-6 MEMS: Introduction and Fundamentals FIGURE 12.4 Infrared images of various states as seen in the experiments. ... offilm surface deformations is well-correlated with the wavelength of the most amplified linear mode pro-portional to d2. Similar conclusions about the dominance of the nucleation mechanism were ... τRis the time of rupture and b is the constant which should be determined from the matching with the far-from-rupture solution. The minimal thickness of the film close to the rupture point is thereforebξᎏ2b2ᎏ2dᎏhЈ048π2d 5 σᎏAЈσa2ᎏ3dAЈᎏ2πσ1ᎏdPhysics...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 2 doc

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 2 doc

... indeterminate set of equations. The continuum model is easier to handle mathematically (andis also more familiar to most fluid dynamicists) than the alternative molecular models. Continuum mod-els ... films fabricated in the shapes of beams and plates by comparing the measured curvatures. These were two-layer compositeMechanical Properties of MEMS Materials 3-9 1 mmFIGURE 3 .5 A cantilever microbeam ... polysilicon, electroplated nickel, and A -5 3 3B steel. These arefrom microspecimens tested in the author’s laboratory.20 m (a)(b)FIGURE 3.12 Microstructure of two common MEMS materials. Note the...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 3 pptx

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 3 pptx

... IsotropicFluid,” J. Fluids Eng. 117, pp. 3 5. Gad- el- Hak, M. (1999) The Fluid Mechanics of Microdevices: The Freeman Scholar Lecture,” J. FluidsEng. 121, pp. 5 33. Gad- el- Hak, M. (2000) Flow Control: Passive, ... illustrateother ramifications of the large surface-to-volume ratio unique to MEMS and provide a molecular view-point to surface forces.Uᎏh ϩ 2Los 4-2 8 MEMS: Introduction and Fundamentals 1.94 .5 8.216.80.360.140.100.06Ls/␳o␥c␶ 5 432100.01 ... considered. The most fundamental of the molecular models is deterministic. The motion of the molecules is gov-erned by the laws of classical mechanics, although at the expense of greatly complicating the...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 4 pps

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 4 pps

... andσTare the tangential momentum and thermal accommodation coef-ficients respectively. The accommodation coefficients model the momentum and energy exchange of gas mol-ecules impinging on the walls. ... cantilever microbeammade of piezoelectric material. The emphasis may be on modeling the electronic circuit and the motion,and thus a simple model for the motion-induced hydrodynamic damping may be ... CouplingFlow-Structure-Thermal-ElectricalDomains 5. 1 Introduction 5- 1 Full-System Simulation • Computational Complexity of MEMS Flows • Coupled-Domain Problems • A Prototype Problem 5. 2 Coupled Circuit-Device Simulation 5- 6 5. 3 Overview...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 6 potx

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 6 potx

... Equation IncludingThermal Creep Flow,” J. Tribol. 110, p. 253 . Gad- el- Hak, M. (2002) “Flow Physics,” in Handbook of MEMS, 1st ed., M. Gad- el- Hak, ed., CRC Press,Boca Raton.Gallis, M. A., Rader, D.J., ... above Mach numbers of approximately two. Furthermore, the application of the 1 3- or 3 5- moment systems to three-dimensional problems remains computationally prohibitive at present.Because of the ... integrating the momentum flux imparted by the molecules strik-ing the particle. The particle can be considered sufficiently small when the Knudsen number based on the particle radius, KnRϭλ/R, implies...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 7 pdf

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 7 pdf

... MEMS: Introduction and Fundamentals y/ymax0.00 .5 1.00.0 1.0 2.0 3.0 4.0 5. 0x/ymaxFIGURE 8.29Microchannel geometry and grid.y/ymax1.00 .5 0.00.01.02.03.0 4.0 5. 0y/ymax1.00 .5 0.00.01.02.03.0 ... agree well with the DSMCresults. The temperature and Mach number profiles especially show very close agreement with the DSMC 8-3 0 MEMS: Introduction and Fundamentals 0.0 1.0 2.0 3.0 4.0 5. 00.0 ... ∆t/21ᎏτ m ∂giᎏ∂t1ᎏ29ᎏ23ᎏ29ᎏ2 9-4 MEMS: Introduction and Fundamentals © 2006 by Taylor & Francis Group, LLCBurnett Simulations of Flows in Microdevices 8-2 5 x/c0 10. 25 0 .5 0. 75 0...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 10 pps

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 10 pps

... along with the theoretical predictions based on the assumed geometry. The right-hand frame shows the same measurements comparedwith the same model but using slightly modified geometric parameters. ... LLC1 1-2 0 MEMS: Introduction and Fundamentals them undesirable in a practical MEMS rotor system. The primary difficulty is that, in order to satisfy the requirements of sub-synchronous stability, the ... minimum gap dimension, the wave bearingin a MEMS machine can be implemented only by selectively enlarging the bearing gap. Piekos (2000) ana-lyzed the performance of the wave bearing for the microengine...
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The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 12 doc

The MEMS Handbook Introduction & Fundamentals (2nd Ed) - M. Gad el Hak Part 12 doc

... various examples of their dynamics relevantfor MEMS are presented, some of them with reference to the corresponding experimental results. The examples discussed examine isothermal, non-isothermal with ... interfacial jump in the momentum flux, the combination of the fourth and the fifth terms represents the jump in the conductive heat flux at both sides of the interface,while the combination of the last ... (19 95) ,Ogata (1997), Raven (19 95) , and Shinners (1992).14.2.1 Mathematical Preliminaries The main mathematical tool in classical linear control theory is the Laplace transform, which transformsthe...
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