[...]... Washington Micro Total Analysis Systems (µTAS): a conference focusing on microanalytical and chemical systems It is an annual meeting and alternates between North America and Europe Summary Microelectromechanical structures and systems are miniature devices that enable the operation of complex systems They exist today in many environments, especially automotive, medical, consumer, industrial, and aerospace... 7 MEM Structures and Systems in RF Applications 189 Signal Integrity in RF MEMS Passive Electrical Components: Capacitors and Inductors Quality Factor and Parasitics in Passive Components Surface-Micromachined Variable Capacitors Bulk-Micromachined Variable Capacitors Micromachined Inductors Microelectromechanical Resonators Comb-Drive Resonators Beam Resonators Coupled-Resonator Bandpass Filters Film... maintenance and monitoring structural health Distributed control of aerodynamic and hydrodynamic systems Military Applications Inertial systems for munitions guidance and personal navigation Distributed unattended sensors for asset tracking, and environmental and security surveillance Weapons safing, arming, and fusing Integrated microoptomechanical components for identify-friend-or-foe systems Head- and... Micro; and Stephen Durant and Christopher Eide of Morrison and Foerster Evan Green and Carter Hand of New Focus were kind enough to review portions of the manuscript Thanks go to our editor, Mark Walsh, for his unwavering support Kirt Williams further thanks his former graduate advisor, Professor Richard S Muller, for having such a profound effect on his life for introducing him to MEMS (Courtesy of: Engineering. .. and added an entirely new section on reliability and quality assurance We added several references to each chapter to direct the advanced reader to the source of the material We also expanded the glossary to assist the novice in understanding and relating to a new terminology Many people provided us technical information and materials specifically for the second edition of this book We thank Bardia... colleagues, friends, and family members This book is no exception I am grateful to Al Pisano for his general support and for recognizing the value of an introductory book on MEMS I would like to thank Greg Kovacs, Kirt Williams, and Denise Salles for reading the manuscript and providing valuable feedback They left an indelible mark of friendship on the pages of the book I am thankful to many others for their... component and the system can readily reach a factor of ten and occasionally higher Another example is an emerging automotive application for MEMS initiated by the U.S Congress when it passed the Transportation Recall Enhancement, Accountability and Documentation (TREAD) Act in 2000 requiring warning systems in new vehicles to alert operators when their tires are underinflated (the law was in response to the... thanks to miniature read and write heads And finally, as the patient went to sleep, an array of micromirrors projected a pleasant high-definition television image onto a suspended screen Many of the miniature devices listed in this story, in particular the pressure, acceleration, and yaw-rate microsensors and the micromirror display, already exist as commercial products Ongoing efforts at many companies... microsystems is an evolutionary process; we spent the last 30 years learning how to build micromachined components, and only recently we began learning about their seamless integration into subsystems and ultimately into complete microsystems One notable example is the evolution of crash sensors for airbag safety systems Early sensors were merely mechanical switches They later evolved into micromechanical sensors... sensors Miniature biochemical analytical instruments Cardiac management systems (e.g., pacemakers, catheters) Drug delivery systems (e.g., insulin, analgesics) Neurological disorders (e.g., neurostimulation) Engine and propulsion control Automotive safety, braking, and suspension systems Telecommunication optical fiber components and switches Mass data storage systems RF and wireless electronics Distributed . Publication Data Maluf, Nadim. An Introduction to microelectromechanical systems engineering 2nd ed. –(Artech House microelectromechanical library) 1. Microelectromechanical systems I. Title II. Williams,. alt="" An Introduction to Microelectromechanical Systems Engineering Second Edition For a listing of recent titles in the Artech House Microelectromechanical Systems (MEMS) Series, turn to the. Capacitors 192 Bulk-Micromachined Variable Capacitors 195 Micromachined Inductors 197 Microelectromechanical Resonators 200 Comb-Drive Resonators 201 Beam Resonators 203 Coupled-Resonator Bandpass