Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com An Introduction to Microelectromechanical Systems Engineering Second Edition Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com For a listing of recent titles in the Artech House Microelectromechanical Systems (MEMS) Series, turn to the back of this book. Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com An Introduction to Microelectromechanical Systems Engineering Second Edition Nadim Maluf Kirt Williams Artech House, Inc. Boston • London www.artechhouse.com Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com Library of Congress Cataloging-in-Publication Data A catalog record for this book is available from the U.S. Library of Congress. British Library Cataloguing in Publication Data Maluf, Nadim. An Introduction to microelectromechanical systems engineering–2nd ed. –(Artech House microelectromechanical library) 1. Microelectromechanical systems I. Title II. Williams, Kirt 621.3’81 ISBN 1-58053-590-9 Cover design by Igor Valdman © 2004 ARTECH HOUSE, INC. 685 Canton Street Norwood, MA 02062 All rights reserved. Printed and bound in the United States of America. No part of this book may be reproduced or utilized in any form or by any means, electronic or mechanical, includ- ing photocopying, recording, or by any information storage and retrieval system, without permission in writing from the publisher. All terms mentioned in this book that are known to be trademarks or service marks have been appropriately capitalized. Artech House cannot attest to the accuracy of this informa - tion. Use of a term in this book should not be regarded as affecting the validity of any trade - mark or service mark. International Standard Book Number: 1-58053-590-9 10987654321 Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com To our families Tanya, Ella, and Jad Erika, Gordon, Brynn, and Reed Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com . Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com Contents Foreword xiii Preface xv Preface to First Edition xix CHAPTER 1 MEMS: A Technology from Lilliput 1 The Promise of Technology 1 What Are MEMS—or MST? 2 What Is Micromachining? 3 Applications and Markets 4 To MEMS or Not To MEMS? 7 Standards 8 The Psychological Barrier 8 Journals, Conferences, and Web Sites 9 List of Journals and Magazines 9 List of Conferences and Meetings 10 Summary 11 References 11 Selected Bibliography 12 CHAPTER 2 Materials for MEMS 13 Silicon-Compatible Material System 13 Silicon 13 Silicon Oxide and Nitride 19 Thin Metal Films 20 Polymers 21 Other Materials and Substrates 21 Glass and Fused Quartz Substrates 21 Silicon Carbide and Diamond 22 Gallium Arsenide and Other Group III-V Compound Semiconductors 22 Polymers 23 Shape-Memory Alloys 23 Important Material Properties and Physical Effects 24 vii Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com Piezoresistivity 24 Piezoelectricity 26 Thermoelectricity 29 Summary 31 References 31 Selected Bibliography 32 CHAPTER 3 Processes for Micromachining 33 Basic Process Tools 34 Epitaxy 34 Oxidation 35 Sputter Deposition 35 Evaporation 36 Chemical-Vapor Deposition 37 Spin-On Methods 40 Lithography 40 Etching 44 Advanced Process Tools 55 Anodic Bonding 55 Silicon Direct Bonding 56 Grinding, Polishing, and Chemical-Mechanical Polishing 57 Sol-Gel Deposition Methods 58 Electroplating and Molding 58 Supercritical Drying 60 Self-Assembled Monolayers 61 SU-8 Photosensitive Epoxy 61 Photosensitive Glass 62 EFAB 62 Nonlithographic Microfabrication Technologies 63 Ultraprecision Mechanical Machining 64 Laser Machining 64 Electrodischarge Machining 65 Screen Printing 65 Microcontact Printing/Soft Lithography 66 Nanoimprint Lithography 67 Hot Embossing 67 Ultrasonic Machining 68 Combining the Tools—Examples of Commercial Processes 68 Polysilicon Surface Micromachining 69 Combining Silicon Fusion Bonding with Reactive Ion Etching 71 DRIE of SOI Wafers 71 Single Crystal Reactive Etching and Metallization 72 Summary 74 References 75 Selected Bibliography 77 viii Contents Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com CHAPTER 4 MEM Structures and Systems in Industrial and Automotive Applications 79 General Design Methodology 79 Techniques for Sensing and Actuation 81 Common Sensing Methods 81 Common Actuation Methods 82 Passive Micromachined Mechanical Structures 85 Fluid Nozzles 85 Hinge Mechanisms 88 Sensors and Analysis Systems 89 Pressure Sensors 89 High-Temperature Pressure Sensors 93 Mass Flow Sensors 94 Acceleration Sensors 96 Angular Rate Sensors and Gyroscopes 104 Carbon Monoxide Gas Sensor 114 Actuators and Actuated Microsystems 116 Thermal Inkjet Heads 116 Micromachined Valves 119 Micropumps 126 Summary 128 References 129 Selected Bibliography 131 CHAPTER 5 MEM Structures and Systems in Photonic Applications 133 Imaging and Displays 133 Infrared Radiation Imager 133 Projection Display with the Digital Micromirror Device TM 135 Grating Light Valve™ Display 139 Fiber-Optic Communication Devices 141 Tunable Lasers 142 Wavelength Locker 151 Digital M × N Optical Switch 154 Beam-Steering Micromirror for Photonic Switches and Cross Connects 156 Achromatic Variable Optical Attenuation 161 Summary 165 References 165 Selected Bibliography 167 CHAPTER 6 MEMS Applications in Life Sciences 169 Microfluidics for Biological Applications 169 Pumping in Microfluidic Systems 170 Mixing in Microfluidics 171 DNA Analysis 172 Contents ix Simpo PDF Merge and Split Unregistered Version - http://www.simpopdf.com [...]... Components: Capacitors and Inductors Quality Factor and Parasitics in Passive Components Surface-Micromachined Variable Capacitors Bulk-Micromachined Variable Capacitors Micromachined Inductors Microelectromechanical Resonators Comb-Drive Resonators Beam Resonators Coupled-Resonator Bandpass Filters Film Bulk Acoustic Resonators Microelectromechanical Switches Membrane Shunt Switch Cantilever Series... States and sponsored by SPIE of Bellingham, Washington Micro Total Analysis Systems (µTAS): a conference focusing on microanalytical and chemical systems It is an annual meeting and alternates between North America and Europe Summary Microelectromechanical structures and systems are miniature devices that enable the operation of complex systems They exist today in many environments, especially automotive,... and Stephen Durant and Christopher Eide of Morrison and Foerster Evan Green and Carter Hand of New Focus were kind enough to review portions of the manuscript Thanks go to our editor, Mark Walsh, for his unwavering support Kirt Williams further thanks his former graduate advisor, Professor Richard S Muller, for having such a profound effect on his life for introducing him to MEMS Simpo PDF Merge and... Chapter 8 on packaging to include packaging of optical MEMS products and added an entirely new section on reliability and quality assurance We added several references to each chapter to direct the advanced reader to the source of the material We also expanded the glossary to assist the novice in understanding and relating to a new terminology Many people provided us technical information and materials specifically... Integrated microoptomechanical components for identify-friend-or-foe systems Head- and night-display systems Low-power, high-density mass data storage devices Embedded sensors and actuators for condition-based maintenance Integrated fluidic systems for miniature propellant and combustion control Miniature fluidic systems for early detection of threats from biological and chemical agents Electromechanical signal... book I am thankful to many others for their comments, words of encouragement, and contributions To Bert van Drieënhuizen, Dominik Jaeggi, Bonnie Gray, Jitendra Mohan, John Pendergrass, Dale Gee, Tony Flannery, Dave Borkholder, Sandy Plewa, Andy McQuarrie, Luis Mejia, Stefani Yee, Viki Williams, and the staff at NovaSensor, I say, “Thank you!” Jerry Gist’s artistic talents proved important in designing... thanks to miniature read and write heads And finally, as the patient went to sleep, an array of micromirrors projected a pleasant high-definition television image onto a suspended screen Many of the miniature devices listed in this story, in particular the pressure, acceleration, and yaw-rate microsensors and the micromirror display, already exist as commercial products Ongoing efforts at many companies... companies and laboratories throughout the world promise to deliver, in the not-too-distant future, new and sophisticated miniature components and microsystems It is not surprising, then, that there is widespread belief in the technology’s potential to penetrate in the future far-reaching applications and markets What Are MEMS—or MST? In the United States, the technology is known as microelectromechanical systems. .. microsystems is an evolutionary process; we spent the last 30 years learning how to build micromachined components, and only recently we began learning about their seamless integration into subsystems and ultimately into complete microsystems One notable example is the evolution of crash sensors for airbag safety systems Early sensors were merely mechanical switches They later evolved into micromechanical sensors... Invasive and noninvasive biomedical sensors Miniature biochemical analytical instruments Cardiac management systems (e.g., pacemakers, catheters) Drug delivery systems (e.g., insulin, analgesics) Neurological disorders (e.g., neurostimulation) Engine and propulsion control Automotive safety, braking, and suspension systems Telecommunication optical fiber components and switches Mass data storage systems . Micro; and Stephen Durant and Christopher Eide of Morrison and Foerster. Evan Green and Carter Hand of New Focus were kind enough to review portions of the manuscript. Thanks go to our editor,. Publication Data Maluf, Nadim. An Introduction to microelectromechanical systems engineering 2nd ed. –(Artech House microelectromechanical library) 1. Microelectromechanical systems I. Title II. Williams,. Capacitors 192 Bulk-Micromachined Variable Capacitors 195 Micromachined Inductors 197 Microelectromechanical Resonators 200 Comb-Drive Resonators 201 Beam Resonators 203 Coupled-Resonator Bandpass