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The MEMS Handbook MEMS Applications (2nd Ed) - M Gad el Hak Episode 1 Part 1 ppt

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 1 ppt

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 1 ppt

... precludeMicroscale Vacuum Pumps 8-2 1 0 .1 1 10 10 0pImTorr 10 11 10 12 10 13 1014 10 15 10 16 10 17 1011 10 12 10 13 10 14 10 15 10 16 10 17 Vp/N•Vp/NMIcro /Meso•Vp/NMacro•Q/ ... Applications SPPERRBCLRVDR 1. E+00 1. E+02 1. E+04 1. E+06 1. E+08 1. E +10 1. E +12 1. E−22 1. E− 21 1.E−20 1. E 19 1. E 16 1. E 17 1. E 18 1. E 15 1. E 14 1. E 13 1. E 12 QNDDP (1 stage)DDP(30 stages)DIATM-4DIFSCL-2TM-2T/DRORBSCLSCWIsentropicReversible ... 1. 6, 1E3 3.3E-3 20 1E -1 6 6E2 Piltingsrud, 19 96Sputter Ion (SP) 1E-7, 1E3 2.2 1. 1E-2 1. 7E -1 5 1E10 Based on Suetsugu, 19 93, 1. 5 cmdia., 3 .1 cm lengthTurbomolecular (TM-2) 1E-6, 1E1 4 7 5E -1 4 1E7...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 3 ppt

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 3 ppt

... Spreaders 1 1- 2 5Modeling of Micro Heat Spreaders • Testing of Micro HeatSpreaders • Fabrication of Micro Heat Spreaders 11 .5 New Designs 1 1- 2 8 11 .6 Summary and Conclusions 1 1- 3 2 11 .1 IntroductionA ... Spreaders 11 .1 Introduction 1 1- 1 Fundamentals of Heat Pipe Operation 11 .2 Individual Micro Heat Pipes 1 1- 1 0Modeling Micro Heat Pipe Performance • Testing ofIndividual Micro Heat Pipes 11 .3 Arrays ... & Francis Group, LLCLaminar-incompressibleRevϽ 2300, MavϽ 0.2(fvRev) ϭ 16 (11 .18 )C ϭ 1. 00Laminar-compressibleRevϽ 2300, MavϾ 0.2(fvRev) ϭ 16 (11 .19 )C ϭ΄ 1 ϩ΂ ΃Ma2v΅ 1/ 2Turbulent-incompressibleRevϾ...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 4 pptx

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 4 pptx

... 12 0 14 0 16 0Length of the film, mmExp.Model 2Model 1 Qmax, WFIGURE 11 .17 Comparison of the modeling and experimental results on microchanneled polymer films.(Reprinted withpermission from ... capillary pumping whileoptimizing the thin film region of the meniscus in order to maximize the heat flux [Wayner et al. 19 76;Peterson and Ma, 19 96b, 19 99; Peterson and Ma 19 99]. 1 1- 2 6 MEMS: Applications Laser ... and Micro Heat Spreaders 1 1- 1 3© 2006 by Taylor & Francis Group, LLC 12 MicrochannelHeat Sinks 12 .1 Introduction 1 2 -1 12 .2 Fundamentals of Convective Heat Transfer in Microducts 1 2-2 Modes...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 2 ppsx

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 2 ppsx

... Ϫᎏ͙ 1 2ෆᎏ)L, will then be driven by this sur-face flow above the electrodes.͙2ෆᎏ2 9 -1 2 MEMS: Applications −20 10 0 10 20−20 10 0 10 20(b)−20 10 0 10 20−30−20 10 0 10 2030(a)−20 ... field-induced dipoles at the dielectric particle or cell surface. If the dynamic polarization is dueentirely to the normal field and is fast compared to the period of the AC field, the Maxwell ... the bubble 1 0 -1 0 MEMS: Applications FIGURE 10 .11 (See color insert following page 2 -1 2.)Bubble volume variation versus time for three different heaterdesigns under same heat flux of 1. 2 GW /m 2,...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 5 potx

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 5 potx

... of the boiling pattern.Microchannel Heat Sinks 1 2 -1 9050 10 0 15 02002503000 10 15 20x (mm)T (°C)0 mL/min (0 kPa) 0.25 mL/min (80 kPa) 1. 1 mL/min (16 0 kPa) 1. 8 mL/min (320 kPa)Device I, ... (e.g., the U.S. National Aerospace Plane) provides new challenges for researchers in the field of flow control. The three books by Gad- el- Hak et al. (19 98), Gad- el- Hak (2000) and Gad- el- Hak and ... Chambre, 19 61] :Kn Ͻ 10 Ϫ3continuum flow 10 Ϫ3Ͻ Kn Ͻ 10 Ϫ 1 slip flow 10 1 Ͻ Kn Ͻ 10 1 transition flow 10 1 Ͻ Kn free molecular flowIn the slip-flow regime, the continuum flow model is still...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 6 potx

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 6 potx

... order, Gad- el- Hak and Blackwelder (19 87b; 19 89), Lumley (19 91; 19 96), Choi et al. (19 92), Reynolds (19 93), Jacobson and Reynolds (19 93a; 19 93b; 19 94; 19 95; 19 98), Gad- el- Hak (19 93; 19 94; 19 96; 19 98; ... others, Bushnell (19 83; 19 94); Wilkinson et al. (19 88); Bushnell and McGinley (19 89); Gad- el- Hak (19 89; 2000); Bushnell and Hefner (19 90); Fiedlerand Fernholz (19 90); Gad- el- Hak and Bushnell ... Laufer, 19 75; Willmarth, 19 75a; 19 75b; Saffman, 19 78; Cantwell, 19 81; Fiedler, 19 86; 19 88; Blackwelder, 19 88; 19 98; Robinson, 19 91; Delville et al., 19 98]. The paper by Robinson (19 91) in particular...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 8 pdf

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 8 pdf

... Jet:Uj = 210 m/ s [M j = 0.6]0.050.070 .10 x/DForcing frequencyf (Hz)fu′u′ (m 2/s2 Hz) 10 –6 10 –5 10 –4 10 –3 10 –2 10 1 100 10 –6 10 –5 10 –4 10 –3 10 –2 10 1 1000 5000 10 000 15 000 ... amplitude0 1 48 1 92 13 522.5°AxisymmetricHelical (m= 1) m 0500 10 00 15 002000250030005 10 15 Helical mode phase 1 48φ 1 (deg.)Device # m Slope = 22.2Slope = 91. 2Slope = 17 9.2 1 92 13 522.5°Device ... desired.Towards MEMS Autonomous Control of Free-shear Flows 1 5 -1 5–20 10 0 10 2030400 20 40 60 80 10 0 12 0 14 02 .10 × 10 53 .15 × 10 54.20 × 10 55.25 × 10 5Change of normalizedroll moment (%)Re°(a)–20 10 0 10 2030400...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 9 pdf

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 9 pdf

... a 1 5-3 2 MEMS: Applications X mm0 5 10 15 20(a)X mm0 5 10 15 20(b)X mm0 5 10 15 20(c)X mm0 5 10 15 20(d)FIGURE 15 .38 Phase-averaged stream line plots at different phases of the forcing ... result the sensorTowards MEMS Autonomous Control of Free-shear Flows 1 5-2 9 MEMS sensor andactuator array MEMS sensorsDynamic separationReattachmentFlowFIGURE 15 .33 Control system components ... Screech in High-Speed Jets,” Nineth Annual International Workshop on Micro ElectroMechanical Systems (MEMS ’96), pp. 19 –24, 11 15 February, IEEE, San Diego, California. 1 5-3 4 MEMS: Applications ©...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 1 ppt

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 1 ppt

... Group, LLC 12 Microchannel Heat Sinks Yitshak Zohar 1 2 -1 13 Flow Control Mohamed Gad- el- Hak 1 3 -1 14 Reactive Control for Skin-Friction Reduction Haecheon Choi 1 4 -1 15 Toward MEMS Autonomous Control ... Plummer 4 -1 5 Microactuators Alberto Borboni 5 -1 6 Sensors and Actuators for Turbulent Flows Lennart Löfdahl and Mohamed Gad- el- Hak 6 -1 7 Microrobotics Thorbjörn Ebeforsand Göran Stemme 7 -1 8 ... Fan-Gang Tseng 1 0 -1 11 Micro Heat Pipes and Micro Heat Spreaders G. P. Petersonand Choondal B. Sobhan 1 1- 1 xi© 2006 by Taylor & Francis Group, LLCviiEditor-in-ChiefMohamed Gad- el- Hak received...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 2 pot

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 2 pot

... In monolithically integrated technology, the 2-2 2 MEMS: Applications 05 10 15 20 10 0 11 0 12 0 13 0 14 0 15 0Damping Ratioξ = 0.0ξ = 0 .1 ξ = 1. 0ξ = 1. 5Beam length ( m) Maximum deflection ( m) FIGURE ... operation.2mghᎏk 2-2 0 MEMS: Applications 00.050 .1 0 .15 0.2 1 −0.50 0.5 1 TemperatureT = 90°CT = 25°CT = −40°CDistance from die center (mm)Out-of-plane displacement ( m) FIGURE 2 .10 Die deformation ... transferred from the drive mass to the sense mass in an efficient way; yet the feed-back from the motion of the sense mass to the drive mass is kept to a minimum by frequency matching. Acarand Shkel (2003)...
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