... and Ducts at Micro and NanoScales,” Microscale Thermophys. Eng. 3, p. 43.Beskok, A. (20 02) “Molecular-Based Microfluidic Simulation Models,” in Handbook of MEMS, 1st ed., M. Gad- el- Hak, ed., CRC ... example, the 35-moment system of Brown [1996]) do not yieldnumerical solutions above Mach numbers of approximately two. Furthermore, the application of the 1 3- or 35-moment systems to three-dimensional ... with the compressible CFL time step [Wesseling, 20 01], which is not very different from a DSMC time step in a 7 -2 2 MEMS: Introduction and Fundamentals 6We use the term continuum here to emphasize...