... W. Menz, and W. K. Schomburg, “Micropump Manufactured by ThermoplasticMolding,” Proceedings. IEEE Micro Electro Mechanical Systems (MEMS ’94), Oiso, Japan, January1994, pp. 18–21.Desta, Y. M. , ... W. Menz, and W. K. Schomburg, “Micropump Manufactured by ThermoplasticMolding,” Proceedings. IEEE Micro Electro Mechanical Systems (MEMS ’94), Oiso, Japan, January1994, pp. 18–21.Desta, Y. M. , ... developed from microelectronic processing, however, X-ray-based approaches may be largely carried out independent of a tightly controlled clean-room environment. The mode of X-ray-based microfabrication...