... discusses molecular-based models and their relation to the
continuum models previously considered.
The most fundamental of the molecular models is a deterministic one. The motion of the molecules
is ... containing 34 20 0-
µ
m- wide
×
10 0-
µ
m- deep channels machined into the 20 0-
µ
m- thick stainless steel foils by the process of direct,
high-precision...
... sensing,
computation, actuation, control, communication and power generation within the same microchip. The
small size, light weight and high-durability of MEMS, combined with the mass-fabrication ... super-Burnett
equations), or moment methods based on taking the moments of the Boltzmann equation with flow
variables (leading to Grad’s 13-moment equations or Levermore’ moment equati...
... cells are also active areas of research.
Before multiphase flow in microchannels becomes a reality, however, several fundamental problems
that arise from the small dimension of the channels must ... Most of these problems originate
from the large curvature of the interface between two phases in these small channels. As a result, capillary
effects and other related phenomena dominate in...
... R
111
the etch rate in nm/min and R
v
the groove widening, also in nm/min. The V-groove widening
experiment then results in a R
111
of 2 .55 ± 0. 15 nm/min. In practice, this etch rate implies a mask
underetching ... 0.9
m for an etch depth of 360 m. For a 1-mm-long V-groove and a 1° misalign-
ment angle, a total underetching of 18
m is theoretically expected, with 95% due to...
... Actuators A, 25, 55 9 56 3, 1991.
Bustgens, B., W. Bacher, W. Menz, and W. K. Schomburg, “Micropump Manufactured by Thermoplastic
Molding,” Proceedings. IEEE Micro Electro Mechanical Systems (MEMS ’94), ... Actuators A, 25, 55 9 56 3, 1991.
Bustgens, B., W. Bacher, W. Menz, and W. K. Schomburg, “Micropump Manufactured by Thermoplastic
Molding,” Proceedings. IEEE Micro Electro Mechanical Sy...
... both electrical and mechanical
devices. Via microlevel mechanical operation, MEMS devices, as sensors, transform mechanical, chem-
ical, optical, magnetic and other nonelectrical parameters to electrical/electronic ...
Harsh-Environment MEMS
Substrates • Metallization/Electrical Interconnection
System • Die-Attach • Hermetic Sealing
23.3 High-Temperature Electrical Interconnection
S...