... Tool 19 .9 Materials for EFAB 19 .10 EFAB Performance Accuracy • Materials Properties 19 .11 EFAB Compared with Other SFF Processes 19 .12 EFAB Compared with Other Microfabrication Processes 19 .13 ... 25, 559–563, 19 91. Bustgens, B., W. Bacher, W. Menz, and W. K. Schomburg, “Micropump Manufactured by ThermoplasticMolding,” Proceedings. IEEE Micro Electro Mechanical Systems (MEMS ’94), Oiso, ... pp. 19 1 19 8.Anderer, B., W. Ehrfeld, and D. Munchmeyer, “Development of a 10 –Channel Wavelength DivisionMultiplexer/Demultiplexer Fabricated by an X-Ray Micromachining Process,” SPIE, 10 14, 17 –24, 19 88.Becker,...